The Theoretical Model and Simulation of Resonant Sensors

The resonator simulator provides a new method for researching the resonant sensor closed-loop circuit. In this paper, the mathematic model of silicon pressure resonator is established to design the circuit with resonator characteristic. Firstly the relation between pressure and the amplitude-frequency characteristic of the resonant beam is deduced. Secondly, combined with the in-out of excitation and pick-up, a complete mathematic model of resonator characteristic is given. Then typical experimental data fitting is made to provide particular parameters for the simulator. Finally a method for the circuit of design is provided.