An evaluation of the immunity characteristics of an LSI with capacitors embedded in an interposer

To improve the electrical characteristics of LSIs, we are developing technology for embedding chip capacitors into interposers for LSIs. In this paper, we applied an interposer with embedded capacitors to an image-processing LSI and compared its electrical characteristics with that of a conventional LSI. We confirmed improvements in the timing margin, signal integrity, and immunity characteristics of the LSI.