Polymer solid-electrolyte (PSE) switch embedded in 90nm CMOS with forming-free and 10nsec programming for low power, nonvolatile programmable logic (NPL)

A novel polymer solid-electrolyte (PSE) switch, NanoBridge, featuring forming-free programming and an extremely high OFF/ON resistance ratio of 10
⁵
has been embedded in a 90nm-node CMOS by a fully logic-compatible process. Fast programming of 10nsec is also achieved in a 50nmφ 1k-bit-cell array by introducing the PSE, enabling a short and parallel programming. The OFF-state T
₅₀
lifetime at 125°C is extrapolated to be more than 10 years. The developed switch is a strong candidate for realizing a low-power and low-cost nonvolatile programmable logic (NPL).