High-precision positioning by structural design using vibration node

This paper presents a structural and controller design for fast and high-precision positioning systems. In order to achieve the high positioning performance, effects of mechanical vibration modes at around the control bandwidth on the performance should be compensated, where the vibration suppression is one of promising techniques from the viewpoints of the controller design as well as the optimization of mechanism. In this research, therefore, the primary vibration mode is canceled by the structural design considering node of the vibration modes, clarifying the guideline of structural design on the basis of a mode shape obtained by modal analyses. According to the designed mechanism, the controller for the fast and high-precision positioning can be easily designed by the simple structure. The proposed approach has been verified by experiments using a positioning device for industrial galvano scanners.