An improved AFM dynamic imaging method based on data fusion of neighboring points set

An atomic force microscopy is an important tool in the field of nanotechnology and nanomanipulation. Based on the filtering and data fusion method, this paper proposes an innovative improved imaging method to enhance the imaging precision ofAFMalong the Z direction. Specifically, this article first introduces the common imaging method utilized among commercial AFMs, then an improved dynamic imaging method based on data fusion of neighboring points set is presented to deal with the large imaging error along Z direction due to the AFM nonlinear characteristics when scanning a highly coarse surface or scanning with high speed. Finally some simulation results are included to demonstrate the superior performance of the proposed imaging method.