EC recycling technology for chemical reduction and energy saving in semiconductor or FPD fabrications

We have developed ethylene carbonate recycling process and system for chemical reduction and energy saving on photo-resist stripping and cleaning process, which will be a core process technology to get high performance and low price in semiconductor or FPD fabrications. Using this novel technology it is possible for the semiconductor wafer and FPD planer to process with low cost, and also there will be improvement of environmental pollution.