Development of on-chip double-shielded quantum Hall device for use in ac quantized Hall resistance measurement

We have developed a on-chip double-shielded quantum Hall device and a double-shielded chip-carrier. The device in conjunction with the carrier will realize impedance standard based on the quantum Hall effect. In this configuration, the Hall bar is covered by separated on-chip shields and shields of the chip carrier to retrieve the leakage current. In this paper, we show detail of the QHR device fabrication and the structure of the chip carrier.