Modeling and analyzing of an H-drive precision XY stage

This paper discussed the model of an H-drive precision XY stage of asymmetric structure in order to improve the H-drive performance. It analyzed the characteristics of dual input dual output (DIDO) of the H-drive precision XY stage during different mass ratio of x slide and y beam as well as position of x slide. The analysis presented the changing rule of stage's mass center and payload ratio of the two motors. And a cross-coupling controller was designed based on the H-drive model and analysis. The result of the simulation shows that the cross-coupling controller can effectively improve the positioning property and restrain external disturbance by suppressing the unsynchronized position of the H-drive.