Degradation behavior of TaYOx-based metal-insulator-metal capacitors

Characteristics under constant voltage stress from 5 V to 7 V were carried out to monitor the degradation behavior of TaYO
_x
dielectric layers. It is found that capacitance and the voltage at maximum capacitance gradually increase during constant voltage stressing. However, the leakage current density remains almost constant with the injected charge for a certain period of time.