The Mathematical Model of the MEMS disc element considering its finite width

In this paper the mathematical model of the MEMS disc element considering its width value is proposed. This model considers influence on disk resonance frequencies values of disk geometrical parameters. The first, second and third mode values were calculated. Stresses and stains in disc were simulated. Also in this work gives several proposition for future use of the analyses proposed for the telecommunication systems elements (transformer, filter, ect.) development.