Stochastic modeling of the pull-in voltage in a MEMS beam structure

This work presents a stochastic approach to model the pull-in voltage in a MEMS (Micro Electro Mechanical Systems) beam structure, using Monte Carlo (MC) simulations. The pull-in model is a coupled FEM (Finite Element Method) electrostatic and analytical mechanical model. The shape and material properties of the MEMS constitute the random variables for the MC simulations. The results allow finding the influence of each input parameter and the distribution of the pull-in voltage.