A test structure for integrated capacitor array matching characterization

A novel characterization setup for integrated capacitor array mismatch determination is presented. The biasing of twenty capacitor units and the selection of a specific array are controlled by externally generated digital signals. Information about the spatial matching behavior is provided for an entire MIM capacitor array, where the relevant parameters are the standard deviations ¿(¿C
_i
/ C) and the offsets ¿(¿C
_i
/ C) of units i. Furthermore, the measurement repeatability is determined and an advanced derivation to consider the correlations introduced by the circuit structure and the extraction method is presented. The corresponding test chips were successfully realized in 0.35 um and 0.18 um standard CMOS technologies.