Micro Inductively Coupled Plasma Excitation Source Based on the Three-Dimensional Spiral-Shaped Coil

The paper gets the conclusion that the energy of the three-dimensional structure spiral-shaped coil is more easily concentrated and easy to form high-strength magnetic field in small areas, by using the electromagnetic field theory analysis of the three-dimensional structure and the planar structure spiral-shaped coil. The micro inductively coupled plasma (M-ICP) excitation source of the three-dimensional spiral-shaped coil is proposed. Using the three-dimensional spiral coil M-ICP excitation sources makes the testing experiments of igniting and sustaining. When the argon pressure is 100 Pa and radio-frequency (RF) frequency is 13.56 MHz, the igniting power of the micro-ICP excitation source is 3.8 W, and the sustaining power is 0.5 W. The experimental results show that the three-dimensional spiral-shaped coil ICP excitation source required for smaller RF power than the planar spiral-shaped coil ICP excitation source in igniting and sustaining of plasma discharge.