Based on the fuzzy control of piezoelectric pump with built-in self test

This paper presents a pump built-in self test actuated by piezoelectric bimorphs for fluidic systems. The sensor fabricated by MEMS ensures the accuracy of measurement. The fuzzy control uses in the system. The fuzzy controller in the closed-loop with the flow sensor proved to be effective. The pump is characterized by integrated structure, flow with built-in self test, wide frequency response, etc. The size of the piezoelectric pump with built-in self test is not larger than 30 mm, which is fabricated by precise manufacturing. The high-speed micro processor is used to run the algorithmic program and control the pump with self test. Experiments show that the fuzzy sets and controller are fitted for the flow control system. With the appropriate fuzzy rules, the new type of piezoelectric pump can achieve the precision of 0.5 ¿ l/s.