Reduced order finite element models of Bulk Acoustic Wave Resonators

Finite element (FE) simulation has become an important method in the modeling of Bulk Acoustic Wave (BAW) devices. Unfortunately the FE method is very demanding on computational resources. Moreover most techniques to reduce the complexity of FE models are not applicable to piezoelectric materials. Although model order reduction using moment matching can be applied to piezoelectric materials, this method is not commonly used by developers and scientists. In this work Model Order Reduction using moment matching (MOR) is utilized to simulate BAW resonators.