Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements

Two resonators with polysilicon microbeams as oscillating elements are presented. One oscillator is capacitively excitated and detected, the other one is electro-thermally activated and measured by means of piezoresistors. Sacrificial layer technology with different types of sacrificial dioxide (thermal and CVD) is applied for the fabrication of the free-standing polysilicon beams. Gain/phase measurements are performed to examine the frequency response of the resonators.