An 80×60 range image sensor based on 10µm 50MHz lock-in pixels in 0.18µm CMOS

A lock-in pixel array based on a fast charge transfer pinned photo-detector for time-of-flight range imaging is presented. Distance measurements at 5-to-20 fps on a 6-to-3m range are reported with a linearity error lower than 0.7% and a repeatability of 5-to-16 cm, while the best achievable precision is 2.7 cm. A demodulation frequency up to 50 MHz is demonstrated with a contrast of 29.5%.