A CMOS temperature sensor with an energy-efficient zoom ADC and an Inaccuracy of ±0.25°C (3s) from −40°C to 125°C

A 0.26 mm
²
CMOS temperature sensor is realized in a 0.16 μm CMOS process. It uses a hybrid SAR/ΔΣ (zoom) ADC to achieve 0.018°C resolution at 10S/s while dissipating 9 μW. After a 1-point trim, the sensor achieves an inaccuracy of ±0.25°C (3σ) in the range from -40°C to 125°C.