Novel, 100V, Trench Super Junction high voltage TFTs using low temperature poly crystalline silicon

First results of 100 V, novel Trench Super Junction HVTFTs fully compatible to the LTPS technology are presented. They exhibit ON/OFF current ratio of more than 10
⁷
with sub-threshold swing of 0.75V/decade and specific resistance (Rsp) of 40Ωmm
²
.The influence of geometric parameters on both unipolar and bipolar devices is analysed.