Development of suspended gate field effect transistors array-based microsystem for pH measurements

This work presents the specifications of a microsystem which allows pH electrical measurements of solution especially for water monitoring applications. The architecture of this microsystem consists in SGFET (Suspended gate Field Effect Transistor) array-based, control and processing modules. The array is composed of 3 × 3 identical SGFET sensors. Each SGFET can be addressed independently to increase the accuracy and the reliability of the global measurements.