Dc to radio-frequency characterization of zro2 dielectric for "metal-insulator-metal" integrated capacitors

This paper deals with the electrical and wideband frequency characterizations of Metal-Insulator-Metal capacitors integrating medium-k material ZrO
₂
. Characterizations are performed from DC up to 4 GHz on micro-strip waveguides structures. We investigate electrical performance of MIM capacitors which integrate thicknesses of 45 nm to 10 nm of ZrO
₂
dielectric layer. In particular, this paper focuses on the frequency effect on the voltage linearity of these capacitors. The dependence of the Voltage Capacitance Coefficient ¿ is underlined from 1 kHz to 1 GHz.