Prospects of carbon nanomaterials in VLSI for interconnections and energy storage

Carbon nanomaterials (such as carbon nanotubes (CNTs) and graphene nanoribbons (GNRs)) are being actively investigated f or possible use in ICs due to their promising electrical, thermal an d mechanical properties. This paper discusses their prospects as interconnects and high-density energy storage elements, from both modeling and fabrication perspectives. It al so highlights the possible applications of these nano materials in off- chip wiring an d packaging, ESD protection, as well as in emerging 3-dimensional integrated circuits.