MEMS tunable Michelson interferometer with robust beam splitting architecture

A new beam splitter is proposed to realize a completely integrated Michelson interferometer, where a single medium interface (Si/Air) is used for optical beam splitting. This offers a stable splitting ratio over a very wide spectral range. Using this technique on SOI wafers, with a moving mirror, a highly robust and tunable interferometer is fabricated. The tunable interferometer is tested experimentally by measuring optical interference versus mirror displacement.