Ultra Low-Loss 50-70 GHz SPDT Switch in 90 nm CMOS

This paper presents an ultra low-loss 50-70 GHz single-pole double-throw (SPDT) switch built using standard 90 nm CMOS process. The switch is based on lambda/4 transmission lines with shunt inductors at the output matching network. High substrate resistance contacts are used to achieve low insertion loss. The SPDT switch results in a measured insertion loss of 1.5 dB at 55 GHz and < 2 dB at 50-70 GHz. The measured isolation is > 25 dB, and the output port-to-port isolation is > 27 dB at 50-70 GHz. The measured PldB is 13.5 dBm with a corresponding IIP3 of 22.5 dBm at 60 GHz. The return loss is better than -8 dB at 50-70 GHz. The active chip area is 0.5 times 0.55 mm
²
and can be reduced in future designs by folding the on lambda/4 transmission lines. To our knowledge, this paper presents the lowest insertion loss 60 GHz SPDT in any CMOS technology to-date.