Microwave study of tunable planar capacitors using mn-doped ba0.6sr0.4tio3 ceramics

This paper deals with the microwave study of coplanar tunable capacitors using Mn-doped Ba
_0.6
Sr
_0.4
TiO
₃
ceramics. These ceramics are developed to improve performance at microwave frequencies (i.e., compromise between tuning capabilities and insertion losses). Interdigitated capacitors were first fabricated on thick Mn-doped BST ceramics. The capacitors showed reduced tuning factor because of a parasitic capacitance between the contact pads. The use of Mn-doped BST/ SiO
₂
bilayers led to a significant enhancement of the capacitor performance (57% of agility under 200 V at 1 GHz).