Very low dark current AlInAs/GaInAs SAGM avalanche photodiodes for 10Gb/s applications

We report a planar AlInAs/GaInAs APD presenting simultaneously the lowest multiplied dark current ever reported (I
_dM
= 0.19 nA), a responsivity of 0.9 A/W (at M = 1), a very low noise (F(M = 10) = 3.3), and a high gain bandwidth (150 GHz).