New polysilicon sensor and actuator technology for the development of a thermal platform

This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40 mV/degC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating conditions. First encouraging results of temperature detection are presented.