Tiny (0.72 mm2) pressure sensor integrating MEMS and CMOS LSI with back-end-of-line MEMS platform

A back-end-of-line (BEOL) MEMS platform for a compact, high-precision pressure sensor was developed. A CMOS-LSI-integrated MEMS pressure-sensor chip (with a size of 0.72 mm
²
) was fabricated on the platform. The sensor provides both high accuracy and accommodates miniaturization. Its sensitivity offers design flexibility simply by changing the size of its MEMS capacitors. The pressure sensor is thus suitable for various pressure-range applications.