LTCC microreactor with thermal stabilization

The paper presents application of the LTCC (low temperature co-fired ceramic) technology in microsystems. A heated chamber with additional temperature sensors is demonstrated. The aim of the work is to obtain heated microchamber characterized by small thermal inertia and uniform distribution of the temperature inside. The finite element analyses (FEA) are used to demonstrate thermal properties of designed device. Moreover, the temperature distribution on the surface of the microreactor is measured. The proper temperature management is achieved.