Interfacing fluidic sensors based on LTCC

Fluidic sensors can be easily integrated in Low Temperature Cofiring Ceramic (LTCC) systems. This article describes electronic circuits for interfacing typical fluidic sensors, e.g. piezoresistive pressure transducers, anemometric flow meters and capacitive transducers. Due to their character the sensor signal have to be amplified, offset and temperature compensated and filtered. Furthermore the original physical value of these electrical signals has to be recalculated. On this basis some models for the transducers were designed.