Design of a 2D High Precision Motion Stage

A small scale, high precision positioning table was developed to solve measurement problems originating from microtechnic. A construction with a single reference surface preferred and vacuum preloaded air bearing are used to enable smooth motion and eliminate stick slip. The nested tables are driven by ultrasonic piezomotors to enable submicron resolution, high speed and low health generation. The nonlinearity of the piezomotors is corrected partly by the amplifier used, and partly by the control software. Laser interferometers measure both the displacement and the angular error. Mathematical evaluation of the measuring system's error is described and its application in the control software is presented.