Analysis of RF plasma using electrical equivalent circuit

The electrical equivalent circuits of RF plasmas have been obtained by use of the accurate probe measurements and HSPICE simulation. Using the obtained equivalent circuits, the electrical characteristics of SF/sub 6/ and Ar plasmas have been compared. The SF/sub 6/ plasma displays sinusoidal waveforms of the plasma potential for the capacitive sheath characteristics. On the other hand, in Ar plasma the displacement current through the grounded electrode sheath is comparable to the conduction current. The plasma potential in Ar plasma has significantly higher harmonics for the nonlinear characteristics of the grounded electrode sheath. This analysis method serves as an essential tool for modelling RF plasmas.