Deposition of TCo films on plastic substrates by DC arc plasmatron

Summary form only given. Transparent conducting zinc oxide (ZnO) films have been extensively studied in recent several years because it is the non-poisonous, abundant and cheap material. ZnO films have been deposited by various techniques such as r.f. sputtering, pyrolysis and metal-organic CVD. Industrial manufacturing of the solar cells requires a development of cheap, effective and scalable technology. Typically used laboratory techniques don't satisfy the industrial requirements in full.