PECVD technologies assisted with millimeter waves

Summary form only given. Gas discharges supported by millimeter wave beams generated by gyrotron are considered. Such discharges produce super high density plasma. Application of these discharges in the PECVD (plasma enhances chemical vapour deposition) technologies allow to increase the rate of activation of the gas medium sufficiently as compared with traditional microwave based reactors in which plasma is generated by radiation of 2.45 GHz and 0.915 GHz frequencies.