Study on nonlinear compensation of eddy current sensor based on support vector machine

The input/output characteristic curve of eddy current sensor is nonlinear. In order to ensure the linear relationship between the input and output, the compensation of eddy current sensor is very necessary. According to the non-linear problem caused by temperature and circuit interference during the detection process of the eddy current sensor, a nonlinear compensation method is proposed based on the support vector machine theory. The nonlinear characteristics of measured values of sensor are analyzed, and the support vector machine (SVM) inverse model is established while the displacement parameters as the output and voltage parameter as input. The effectiveness of SVM inverse model is verified by the simulation. Compared with the RBF neural network model, the SVM model is efficiency. The average absolute error of the model prediction is 0.0932 mm, so it has good linearity, and nonlinear compensation of eddy current sensor is realized.