Charging acceleration in dielectric less RF MEMS switched varactors under CW microwave power

The effect of microwave power on charging of dielectric less switches is presented and related to temperature elevation. We demonstrate operation under 6.3 Watts CW operation and an estimation of the switch temperature under 50% duty cycle bipolar bias. It is shown that the switch is following accelerated charging with similar time evolution than under low power, and that the switch temperature reaches about 60degC under 6.3 W CW of applied microwave signal.