A new methodology for fast development of multilevel metallization for ULSI technology

A methodology has been developed for fast process development and integration of multilevel metallization systems for ultra large scale integration technology. This methodology defines a set of primitive processes, which are then arranged in the required configuration to build or develop multilevel metallization systems. Each primitive process will have a predictive model and process control and calibration strategy including a set of test structures. This paper will describe how the methodology defined above has been applied to develop contacts and vias for multilevel metallization.