Temperature compensated BAW resonator and its integrated thermistor for a 2.5GHz electrical thermally compensated oscillator

This paper presents a miniaturized 2.5 GHz frequency source based on compensated BAW resonator with its integrated temperature molybdenum sensor assembled on the differential Colpitts oscillator. The presence of silicon dioxide layer having a positive temperature coefficient compared to other layers is used to reduce the resonator's drift. A demonstration oscillator achieves a frequency drift of 40 ppm over a temperature range from -35degC to +85degC. The oscillator's phase noise of -113 dBc/Hz at 10 kHz offset from the carrier is reported at 2.5 GHz.