Multidomain simulations of silicon sensors with usage of ANSYS and SUGAR software

In this paper the multidomain simulations of silicon sensors are presented. Authors on the basis of electro-thermal converter show the idea of operation basic structure made by silicon. All structures were simulated in ANSYS and SUGAR software. They allow checking the behavior of such sensors as electro-thermal converter, silicon micromirror, comb-drive resonator, etc. Simulation results are valuable and necessary to proper design the sensors that could be made in one of the available micromachine technology.