Research on the resonant frequency formula of V-shaped cantilevers

This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.