A 300 GHz mHEMT amplifier module

In this paper, we present the development of an H-band (220 – 325 GHz) submillimeter-wave monolithic integrated circuit (S-MMIC) amplifier module for use in next generation active and passive high-resolution imaging systems operating around 300 GHz. Therefore, a variety of compact amplifier circuits has been realized by using an advanced 35 nm InAlAs/InGaAs based depletion-type metamorphic high electron mobility transistor (mHEMT) technology in combination with grounded coplanar waveguide (GCPW) circuit topology. A single-stage cascode design achieved a small-signal gain of 5.6 dB at 300 GHz and a linear gain of more than 5 dB between 258 and 308 GHz. Additionally, a four-stage amplifier S-MMIC based on conventional devices in common-source configuration was realized, demonstrating a maximum gain of 15.6 dB at 276 GHz and a linear gain of more than 12 dB over the frequency range from 264 to 300 GHz. Finally, mounting and packaging of the monolithic amplifier chips into H-band waveguide modules was accomplished with only minor reduction in circuit performance.