Complementary GaAs (CGaAs) technology and applications

A self-aligned complementary GaAs (CGaAs) technology has been developed for low-power, high-speed digital and mixed-mode applications. A single process flow has been used to build low-voltage, low-power, full-complementary digital circuits at 200 MHz, high-speed SCFL digital circuits at 5 GHz, RF MMIC and power circuits (900 MHz), and combinations of these. Complementary digital circuits have demonstrated speed-power performance of 0.1 /spl mu/W/MHz/gate at 0.9 V. A mixed SCFL/Complementary signal processor operated at >1 GHz with a speed-power performance of 0.16 /spl mu/W/MHz/gate.