A new fabrication method for microactuators with piezoelectric thin film using precision cutting technique

A new fabrication method for microactuators and microstructures is presented. It is based on a precision cutting technique and hydrothermal method to make piezoelectric thin film. It is generally considered that the cutting technique is not suitable for microparts fabrication because the cutting force is too large compared to the size of the structure. The authors have used a four axis ultra precision machine tool to prevent the problem of cutting force and were successful in fabricating three dimensional microstructures. Even a 10 /spl mu/m shaft or 100 /spl mu/m screw were possible to fabricate. On the surface of the microstructures, piezoelectric thin film is plated through hydrothermal method. Electrode pattern is produced through direct laser beam ablation. Fabrication examples of each process are presented and an application to a micro vibration gyro is proposed.