Measuring on-wafer high-frequency modulation response characteristics of optical transmitters and detectors

We present accurate techniques for measuring high-speed modulation response characteristics of optoelectronic transmitter and receiver devices. Because the devices we are considering in this paper are only available on wafers, microwave probing techniques have to be applied to establish electrical contact with the device. By doing so, the conventional DC-embedding techniques become too inaccurate to be used for this type of measurement. We present mathematical expressions for the different errors that exist in the measurement system, and they are used in the DC-embedding of the measured modulation response characteristics. Experimental results on several devices show the benefit of the presented measurement techniques.