Using optimization procedures to calculate parameters of MEMS macromodels

The approaches to get a circuit equivalent of microelectromechanical systems' (MEMS) mechanical components are considered. The usage of the circuit design software optimization procedures to adjust macromodels' parameters obtained as a result of the source equivalent circuit reduction is suggested. An example is considered and the simulation results are given for the problem of finding eigenfrequencies of a beam. The recommendations to choose optimization methods are given.