Laser-to-fiber coupling module using a micromachined alignment mirror

We report the fabrication of a laser-to-fiber coupling module that incorporates a movable silicon-micromachined alignment micromirror. The micromirror can position a beam on a fiber within a 0.17 μm standard deviation and has a range of motion of more than 200 μm. Measurements on the module have shown a reproducible coupling efficiency of 40%. The coupling module provides a means to compensate for placement inaccuracies of passively assembled optical components.