Lever-Based CMOS-MEMS Probes for Reconfigurable RF IC's

We report on new lever-based CMOS-MEMS electrothermal probes for memory-intensive self-configuring integrated circuits (MISCICs). The MISCIC vision is to use MEMS conductive probes to reconfigure ICs, mainly RF ICs such as inductors, by mechanically addressing and passing current through resistance change (RC) vias embedded within the chip circuitry. The lever-based actuation causes the probe tips to move away from the probe substrate and toward the RC via substrate, which is in contrast to the previous design where actuation caused the tips to move away from the RC via substrate. Two independently actuated probes are located 3 mum apart to provide two simultaneous contacts that form a reconfiguration current return path. Thermal management such as dummy heater beams and thermal isolation structures are employed to improve the temperature uniformity and drive efficiency. A statistic semi-sphere model is employed to model the contact.