Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications

Piezoelectric Pb(Zr
_0.52
Ti
_0.48
)O
₃
thick film with the thickness around 10 mum has been deposited on the (111) Pt/Ti/SiO
₂
/Si substrate using a ceramic powder/sol-gel solution modified composite method. X-ray diffraction analysis and scanning electron microscope revealed that the film was in the well-crystallized perovskite phase and cracked free. At 1 KHz, The dielectric constant and the loss were 1925 and 0.015, respectively. The remnant polarization was 42.0 muC/cm
²
at room temperature. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 50% at 156 MHz.