Large Qxf product for HBAR using Smart Cut ™ transfer of LiNbO3 thin layers onto LiNbO3 substrate

In this paper, we propose a novel approach for HBAR devices using the Smart Cut ™ technology to obtain thin homogeneous X-cut single crystal films of LiNbO
3
. Sub-micron layers were successfully transferred onto LiNbO
3
handle wafers. RF characterizations were performed around 1.95 GHz and quality factors in excess of 40 000 are extracted, proving the applicability of layer transfer by Smart Cut ™ to acoustic devices. An excellent matching between simulations and experimental data as well as TCF measurements are presented in this paper.