Device fabrication scheme for evaporated SPC poly-Si thin-film solar cells on glass (EVA)

Polycrystalline silicon thin-film solar cells on glass obtained by solid phase crystallisation (SPC) of PECVD-deposited a-Si have good photovoltaic efficiency. In this paper we present a functioning device fabrication scheme for equivalent solar cells made from evaporated SPC poly-Si films (EVA). Respectable efficiencies of above 4% are achieved for both p-type and n-type EVA solar cells on planar glass superstrates. The various hurdles that had to be passed to achieve these results are described.